Dip Coater for the Photo Litho-Coat SA-1407-S1
Mass production / automatic device specifications
This is the Dip Coater to perform the procedures of DIP / Drying automatically with being aimed to make thin film dip coating on plural 3.5 inches wafers, metal plates, glasses, etc. with photo litho-coat liquid at the same time. It is also the Dip Coater applied the technique of the Dip Coat (Dip Coating) which SDI owned to.
| Main Specifications | |
|---|---|
| Stroke | 290mm |
| Object Size | 3.5 inches Wafer |
| Object Material | Wafer, Metal, Glass, etc. |
| Dip Speed | From 0.1mm/sec. to 60mm/sec. |
| Circulation Device of Coating Liquid | Including |
| Temperature Control of Coating Liquid | Not Including |
| Filter Mesh | Including |
| Drying Device | Including |
| Dry Temperature | 100 Centigrade |
| HEPA (High Efficiency Particulate Air Filter) Unit | Including |
| Device Dimension (approx. size) | W:1800×D:1100×H:1850mm |
Japanease
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