Washing Equipments SA-1109
Small lot production / release agent application device specifications /
- This Equipment is the most suitable for the customers who require the clean degree of hi-specifications. This is the Automatic Device for treatment of each process with maximum 8 inches wafers for 5 pieces together at one time according to the set Recipe Parameter. It is the dipcoater Type Washing Equipment which is reflected by SDI’s techniques about Dip Coat (Dip Coating).
Main Specifications | |
---|---|
Stroke | 350mm |
Object Size | 8inch |
Object Material | Wafer, Glass |
Dip Speed | from 0.1 mm/sec. to 40 mm/sec. |
Circulation Device of Coating Liquid | Equipped |
Temperature Control of Coating Liquid | Not Equipped |
Filter Mesh | Not Equipped (Optionally Available) |
Drying Device | Equipped |
Dry Temperature | Not Equipped (Optionally Available) |
HEPA (High Efficiency Particulate Air Filter) Unit | Not Equipped (Optionally Available) |
Equipment Dimension (mm) [approximate] | W:1850×D:900×H:1880mm |