{"id":583,"date":"2025-05-26T10:00:00","date_gmt":"2025-05-26T01:00:00","guid":{"rendered":"https:\/\/www.sdicompany.com\/column\/?p=583"},"modified":"2025-05-02T16:00:07","modified_gmt":"2025-05-02T07:00:07","slug":"improving-film-thickness-uniformity","status":"publish","type":"post","link":"https:\/\/www.sdicompany.com\/column\/improving-film-thickness-uniformity\/","title":{"rendered":"\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u819c\u539a\u5747\u4e00\u6027\u5411\u4e0a\u3068\u306f\uff1f\u57fa\u790e\u77e5\u8b58\u3068\u5b9f\u8df5\u30c6\u30af\u30cb\u30c3\u30af"},"content":{"rendered":"\n<p>\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u69d8\u3005\u306a\u7523\u696d\u3067\u6d3b\u7528\u3055\u308c\u3066\u3044\u308b\u91cd\u8981\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u3057\u304b\u3057\u3001\u5747\u4e00\u306a\u819c\u539a\u3092\u5f97\u308b\u3053\u3068\u304c\u3001\u54c1\u8cea\u7ba1\u7406\u4e0a\u5927\u304d\u306a\u8ab2\u984c\u3068\u306a\u308b\u3053\u3068\u3082\u5c11\u306a\u304f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u819c\u539a\u306e\u3070\u3089\u3064\u304d\u306f\u88fd\u54c1\u306e\u6027\u80fd\u3084\u5916\u89b3\u306b\u60aa\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u305f\u3081\u3001\u305d\u306e\u5bfe\u7b56\u306f\u88fd\u9020\u73fe\u5834\u306b\u3068\u3063\u3066\u55ab\u7dca\u306e\u8ab2\u984c\u3068\u8a00\u3048\u308b\u3067\u3057\u3087\u3046\u3002<\/p>\n\n\n\n<p>\u4eca\u56de\u306f\u3001\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u304a\u3051\u308b\u819c\u539a\u5747\u4e00\u6027\u5411\u4e0a\u306e\u305f\u3081\u306e\u57fa\u790e\u77e5\u8b58\u304b\u3089\u3001\u5b9f\u8df5\u7684\u306a\u5bfe\u7b56\u307e\u3067\u89e3\u8aac\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u819c\u539a\u5747\u4e00\u6027\u5411\u4e0a\u306e\u305f\u3081\u306e\u57fa\u790e\u77e5\u8b58<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7c98\u5ea6\u3068\u819c\u539a\u306e\u95a2\u4fc2<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7c98\u5ea6\u306f\u3001\u819c\u539a\u306b\u5927\u304d\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u7c98\u5ea6\u304c\u9ad8\u3044\u307b\u3069\u3001\u5f15\u304d\u4e0a\u3052\u305f\u969b\u306b\u6db2\u4f53\u304c\u57fa\u677f\u306b\u591a\u304f\u4ed8\u7740\u3057\u3001\u539a\u3044\u819c\u304c\u5f62\u6210\u3055\u308c\u3084\u3059\u304f\u306a\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u9006\u306b\u7c98\u5ea6\u304c\u4f4e\u3044\u3068\u3001\u8584\u819c\u306b\u306a\u308a\u304c\u3061\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u6700\u9069\u306a\u7c98\u5ea6\u306f\u3001\u4f7f\u7528\u3059\u308b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7a2e\u985e\u3084\u76ee\u7684\u3068\u3059\u308b\u819c\u539a\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u7c98\u5ea6\u8abf\u6574\u306b\u306f\u3001\u6eb6\u5a92\u306e\u6dfb\u52a0\u3084\u6e29\u5ea6\u8abf\u6574\u306a\u3069\u304c\u6709\u52b9\u3067\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u3068\u819c\u539a\u306e\u95a2\u4fc2<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u3082\u819c\u539a\u3092\u6c7a\u5b9a\u3059\u308b\u91cd\u8981\u306a\u8981\u7d20\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u4e00\u822c\u7684\u306b\u3001\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u304c\u901f\u3044\u307b\u3069\u539a\u3044\u819c\u304c\u3001\u9045\u3044\u307b\u3069\u8584\u3044\u819c\u304c\u5f62\u6210\u3055\u308c\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u3053\u308c\u306f\u3001\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u304c\u901f\u3044\u3068\u6db2\u4f53\u306e\u6301\u3061\u4e0a\u304c\u308a\u304c\u591a\u304f\u3001\u3086\u3063\u304f\u308a\u3060\u3068\u5c11\u306a\u3044\u305f\u3081\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u3057\u304b\u3057\u3001\u5358\u7d14\u306a\u6bd4\u4f8b\u95a2\u4fc2\u3067\u306f\u306a\u304f\u3001\u6db2\u4f53\u306e\u7c98\u5ea6\u3084\u8868\u9762\u5f35\u529b\u306a\u3069\u3001\u4ed6\u306e\u8981\u56e0\u3082\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u74b0\u5883\u8981\u56e0\u3084\u57fa\u677f\u6750\u8cea\u3068\u8868\u9762\u51e6\u7406\u306e\u5f71\u97ff<\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6e29\u5ea6\u30fb\u6e7f\u5ea6\u306a\u3069\u306e\u74b0\u5883\u8981\u56e0\u306e\u5f71\u97ff<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u5468\u56f2\u306e\u6e29\u5ea6\u3084\u6e7f\u5ea6\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7c98\u5ea6\u3084\u4e7e\u71e5\u901f\u5ea6\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u3001\u819c\u539a\u306e\u5747\u4e00\u6027\u306b\u5f71\u97ff\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u9ad8\u6e29\u3067\u306f\u7c98\u5ea6\u304c\u4f4e\u4e0b\u3057\u3001\u4f4e\u6e29\u3067\u306f\u7c98\u5ea6\u304c\u9ad8\u304f\u306a\u308b\u50be\u5411\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u6e7f\u5ea6\u304c\u9ad8\u3044\u3068\u3001\u4e7e\u71e5\u6642\u9593\u304c\u9577\u304f\u306a\u308a\u3001\u819c\u539a\u306b\u30e0\u30e9\u304c\u751f\u3058\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u305d\u306e\u305f\u3081\u3001\u74b0\u5883\u6761\u4ef6\u3092\u9069\u5207\u306b\u7ba1\u7406\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u57fa\u677f\u6750\u8cea\u3068\u8868\u9762\u51e6\u7406\u306e\u5f71\u97ff<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u57fa\u677f\u306e\u6750\u8cea\u3084\u8868\u9762\u51e6\u7406\u3082\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u6fe1\u308c\u6027\u3084\u4ed8\u7740\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u3001\u819c\u539a\u306b\u5f71\u97ff\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u57fa\u677f\u8868\u9762\u306e\u7c97\u3055\u3084\u89aa\u758e\u6c34\u6027\u306b\u3088\u3063\u3066\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u5e83\u304c\u308a\u65b9\u304c\u5909\u5316\u3057\u3001\u819c\u539a\u306b\u30e0\u30e9\u304c\u751f\u3058\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u9069\u5207\u306a\u8868\u9762\u51e6\u7406\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u819c\u539a\u306e\u5747\u4e00\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u524d\u51e6\u7406\u3068\u3057\u3066\u3001\u4e7e\u71e5\u51e6\u7406\u3084\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306a\u3069\u304c\u6709\u52b9\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u819c\u539a\u5747\u4e00\u6027\u5411\u4e0a\u306e\u305f\u3081\u306e\u5b9f\u969b\u7684\u306a\u5bfe\u7b56<\/h2>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u6700\u9069\u5316<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u76ee\u7684\u3068\u3059\u308b\u819c\u539a\u3084\u57fa\u677f\u6750\u8cea\u3001\u74b0\u5883\u6761\u4ef6\u306a\u3069\u3092\u8003\u616e\u3057\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7c98\u5ea6\u3001\u8868\u9762\u5f35\u529b\u3001\u6eb6\u5a92\u306a\u3069\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u5fc5\u8981\u306b\u5fdc\u3058\u3066\u3001\u6dfb\u52a0\u5264\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u7c98\u5ea6\u3084\u8868\u9762\u5f35\u529b\u3092\u8abf\u6574\u3057\u3001\u5747\u4e00\u306a\u819c\u539a\u3092\u5f97\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u306e\u7cbe\u5bc6\u5236\u5fa1<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u5747\u4e00\u306a\u819c\u539a\u3092\u5f97\u308b\u305f\u3081\u306b\u306f\u3001\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u3092\u7cbe\u5bc6\u306b\u5236\u5fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u30ea\u30cb\u30a2\u5f15\u304d\u4e0a\u3052\u51e6\u7406\u306a\u3069\u3001\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u3092\u6bb5\u968e\u7684\u306b\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u3001\u3088\u308a\u5747\u4e00\u306a\u819c\u539a\u3092\u5f97\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u7279\u306b\u3001\u8907\u96d1\u306a\u5f62\u72b6\u306e\u57fa\u677f\u3067\u306f\u3001\u30ea\u30cb\u30a2\u5f15\u304d\u4e0a\u3052\u304c\u6709\u52b9\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u74b0\u5883\u6761\u4ef6\u306e\u7ba1\u7406<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u6e29\u5ea6\u3084\u6e7f\u5ea6\u3092\u4e00\u5b9a\u306b\u4fdd\u3064\u3053\u3068\u3067\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7c98\u5ea6\u3084\u4e7e\u71e5\u901f\u5ea6\u3092\u5b89\u5b9a\u3055\u305b\u3001\u819c\u539a\u306e\u5747\u4e00\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306a\u3069\u3001\u74b0\u5883\u5236\u5fa1\u3055\u308c\u305f\u7a7a\u9593\u3067\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u52b9\u679c\u7684\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u57fa\u677f\u524d\u51e6\u7406\u306e\u91cd\u8981\u6027<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u57fa\u677f\u306e\u8868\u9762\u51e6\u7406\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u6fe1\u308c\u6027\u3084\u4ed8\u7740\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u4e0a\u3067\u975e\u5e38\u306b\u91cd\u8981\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u6d17\u6d44\u3001\u4e7e\u71e5\u3001\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306a\u3069\u3001\u9069\u5207\u306a\u524d\u51e6\u7406\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u819c\u539a\u306e\u5747\u4e00\u6027\u3084\u5bc6\u7740\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u819c\u539a\u6e2c\u5b9a\u3068\u54c1\u8cea\u7ba1\u7406<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u819c\u539a\u6e2c\u5b9a\u88c5\u7f6e\u3092\u7528\u3044\u3066\u3001\u5b9a\u671f\u7684\u306b\u819c\u539a\u3092\u6e2c\u5b9a\u3057\u3001\u305d\u306e\u7d50\u679c\u306b\u57fa\u3065\u3044\u3066\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u7d71\u8a08\u7684\u624b\u6cd5\u3092\u7528\u3044\u305f\u54c1\u8cea\u7ba1\u7406\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u819c\u539a\u306e\u3070\u3089\u3064\u304d\u3092\u6291\u5236\u3057\u3001\u5b89\u5b9a\u3057\u305f\u54c1\u8cea\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u304a\u3051\u308b\u819c\u539a\u5747\u4e00\u6027\u5411\u4e0a\u306e\u305f\u3081\u306b\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u306e\u7279\u6027\u3001\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u3001\u74b0\u5883\u8981\u56e0\u3001\u57fa\u677f\u524d\u51e6\u7406\u3068\u3044\u3063\u305f\u8907\u6570\u306e\u8981\u7d20\u3092\u7dcf\u5408\u7684\u306b\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u308c\u305e\u308c\u306e\u8981\u7d20\u3092\u6700\u9069\u5316\u3057\u3001\u7cbe\u5bc6\u306a\u5236\u5fa1\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u9ad8\u54c1\u8cea\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u819c\u539a\u6e2c\u5b9a\u306b\u3088\u308b\u7d99\u7d9a\u7684\u306a\u54c1\u8cea\u7ba1\u7406\u3082\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u672c\u8a18\u4e8b\u3067\u7d39\u4ecb\u3057\u305f\u5185\u5bb9\u3092\u53c2\u8003\u306b\u3001\u7686\u69d8\u306e\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5de5\u7a0b\u306e\u6539\u5584\u306b\u5f79\u7acb\u3066\u3066\u3044\u305f\u3060\u3051\u308c\u3070\u5e78\u3044\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u819c\u539a\u306e\u5747\u4e00\u6027\u5411\u4e0a\u306f\u3001\u88fd\u54c1\u306e\u54c1\u8cea\u5411\u4e0a\u306b\u76f4\u7d50\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u9069\u5207\u306a\u5bfe\u7b56\u3092\u8b1b\u3058\u308b\u3053\u3068\u3067\u3001\u751f\u7523\u6027\u5411\u4e0a\u3068\u30b3\u30b9\u30c8\u524a\u6e1b\u306b\u3082\u3064\u306a\u304c\u308b\u3067\u3057\u3087\u3046\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u69d8\u3005\u306a&#8230;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_locale":"ja","_original_post":"https:\/\/www.sdicompany.com\/column\/?p=583","footnotes":""},"categories":[26],"tags":[],"class_list":["post-583","post","type-post","status-publish","format-standard","hentry","category-dip-coating","ja"],"_links":{"self":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts\/583"}],"collection":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/comments?post=583"}],"version-history":[{"count":2,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts\/583\/revisions"}],"predecessor-version":[{"id":615,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts\/583\/revisions\/615"}],"wp:attachment":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/media?parent=583"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/categories?post=583"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/tags?post=583"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}