CVD(\u5316\u5b66\u6c17\u76f8\u6210\u9577)\u3068\u3044\u3046\u8a00\u8449\u3092\u805e\u3044\u305f\u3053\u3068\u306f\u3042\u308a\u307e\u3059\u304b \u3002<\/p>\n\n\n\n
\u8fd1\u5e74\u3001\u69d8\u3005\u306a\u5206\u91ce\u3067\u6ce8\u76ee\u3055\u308c\u3066\u3044\u308b\u8584\u819c\u5f62\u6210\u6280\u8853\u306e\u4e00\u3064\u3067\u3059\u3002<\/p>\n\n\n\n
\u534a\u5c0e\u4f53\u304b\u3089\u5207\u524a\u5de5\u5177\u307e\u3067\u3001\u305d\u306e\u5fdc\u7528\u7bc4\u56f2\u306f\u5e83\u304f\u3001\u79c1\u305f\u3061\u306e\u751f\u6d3b\u3092\u652f\u3048\u308b\u591a\u304f\u306e\u88fd\u54c1\u306b\u8ca2\u732e\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
\u4eca\u56de\u306f\u3001CVD\u306e\u57fa\u672c\u539f\u7406\u304b\u3089\u7a2e\u985e\u3001\u305d\u308c\u305e\u308c\u306e\u30e1\u30ea\u30c3\u30c8\u30fb\u30c7\u30e1\u30ea\u30c3\u30c8\u3001\u305d\u3057\u3066\u5177\u4f53\u7684\u306a\u5fdc\u7528\u4e8b\u4f8b\u307e\u3067\u3001\u5206\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002<\/p>\n\n\n\n
CVD(Chemical Vapor Deposition)\u3068\u306f\u3001\u5316\u5b66\u6c17\u76f8\u6210\u9577\u306e\u7565\u3067\u3001\u6c17\u4f53\u72b6\u306e\u539f\u6599\u3092\u57fa\u677f\u8868\u9762\u306b\u4f9b\u7d66\u3057\u3001\u71b1\u3001\u30d7\u30e9\u30ba\u30de\u3001\u5149\u306a\u3069\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u7528\u3044\u3066\u5316\u5b66\u53cd\u5fdc\u3092\u8d77\u3053\u3057\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u6280\u8853\u3067\u3059\u3002<\/p>\n\n\n\n
\u3053\u306e\u53cd\u5fdc\u306b\u3088\u3063\u3066\u3001\u57fa\u677f\u4e0a\u306b\u76ee\u7684\u3068\u3059\u308b\u7269\u8cea\u306e\u8584\u819c\u304c\u5806\u7a4d\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n
\u5927\u6c17\u5727\u304b\u3089\u4f4e\u771f\u7a7a\u4e0b\u3067\u6210\u819c\u304c\u53ef\u80fd\u3067\u3042\u308a\u3001\u771f\u7a7a\u84b8\u7740\u3084\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u6bd4\u3079\u3066\u3001\u88c5\u7f6e\u306e\u7c21\u7d20\u5316\u3084\u51e6\u7406\u901f\u5ea6\u306e\u9ad8\u901f\u5316\u306b\u7e4b\u304c\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
\u71b1CVD\u306f\u3001\u9ad8\u6e29\u3067\u539f\u6599\u30ac\u30b9\u3092\u5316\u5b66\u53cd\u5fdc\u3055\u305b\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002<\/p>\n\n\n\n
\u30e1\u30ea\u30c3\u30c8\u306f\u6210\u819c\u901f\u5ea6\u304c\u901f\u304f\u3001\u5747\u4e00\u6027\u306e\u826f\u3044\u819c\u304c\u5f97\u3089\u308c\u308b\u70b9\u3067\u3059\u3002<\/p>\n\n\n\n
\u4e00\u65b9\u3001\u30c7\u30e1\u30ea\u30c3\u30c8\u3068\u3057\u3066\u306f\u3001\u9ad8\u6e29\u304c\u5fc5\u8981\u306a\u305f\u3081\u3001\u8010\u71b1\u6027\u306e\u4f4e\u3044\u57fa\u677f\u306b\u306f\u4f7f\u7528\u3067\u304d\u306a\u3044\u3053\u3068\u3001\u9ad8\u6e29\u3067\u53cd\u5fdc\u3057\u306a\u3044\u30ac\u30b9\u306f\u4f7f\u7528\u3067\u304d\u306a\u3044\u3053\u3068\u304c\u6319\u3052\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n
\u30d7\u30e9\u30ba\u30deCVD\u306f\u3001\u30d7\u30e9\u30ba\u30de\u3092\u7528\u3044\u3066\u539f\u6599\u30ac\u30b9\u3092\u6d3b\u6027\u5316\u3055\u305b\u3001\u4f4e\u6e29\u3067\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002<\/p>\n\n\n\n
\u30e1\u30ea\u30c3\u30c8\u306f\u4f4e\u6e29\u3067\u306e\u6210\u819c\u304c\u53ef\u80fd\u3067\u3001\u57fa\u677f\u3078\u306e\u30c0\u30e1\u30fc\u30b8\u304c\u5c11\u306a\u3044\u70b9\u3067\u3059\u3002<\/p>\n\n\n\n
\u3057\u304b\u3057\u3001\u30d7\u30e9\u30ba\u30de\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u3084\u6b8b\u7559\u5fdc\u529b\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
\u5149CVD\u306f\u3001\u5149\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u7528\u3044\u3066\u539f\u6599\u30ac\u30b9\u3092\u52b1\u8d77\u3057\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002<\/p>\n\n\n\n
\u4f4e\u6e29\u30d7\u30ed\u30bb\u30b9\u3067\u57fa\u677f\u30c0\u30e1\u30fc\u30b8\u304c\u5c11\u306a\u3044\u3053\u3068\u304c\u30e1\u30ea\u30c3\u30c8\u3067\u3059\u304c\u3001\u5149\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u5f31\u3044\u305f\u3081\u6210\u819c\u901f\u5ea6\u304c\u9045\u304f\u3001\u9577\u6642\u9593\u306e\u6210\u819c\u3067\u306f\u6c5a\u67d3\u306b\u3088\u308b\u5149\u91cf\u4f4e\u4e0b\u304c\u554f\u984c\u3068\u306a\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
MOCVD(Metalorganic Chemical Vapor Deposition)\u306f\u3001\u6709\u6a5f\u91d1\u5c5e\u5316\u5408\u7269\u3092\u539f\u6599\u3068\u3057\u3066\u7528\u3044\u308bCVD\u306e\u4e00\u7a2e\u3067\u3059\u3002<\/p>\n\n\n\n
\u751f\u7523\u6027\u306b\u512a\u308c\u3001\u5927\u9762\u7a4d\u30fb\u5747\u4e00\u306a\u8584\u819c\u3092\u5f62\u6210\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n
\u3057\u304b\u3057\u3001\u539f\u6599\u30ac\u30b9\u306b\u6bd2\u6027\u306e\u3042\u308b\u3082\u306e\u304c\u591a\u3044\u3068\u3044\u3046\u30c7\u30e1\u30ea\u30c3\u30c8\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
CVD\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u7d76\u7e01\u819c\u3084\u4fdd\u8b77\u819c\u306e\u5f62\u6210\u3001\u5207\u524a\u5de5\u5177\u306e\u8868\u9762\u6539\u8cea\u306a\u3069\u3001\u5e45\u5e83\u3044\u5206\u91ce\u3067\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
\u5177\u4f53\u7684\u306b\u306f\u3001\u534a\u5c0e\u4f53\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u3078\u306e\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u819c\u3084\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u5806\u7a4d\u3001\u5207\u524a\u5de5\u5177\u3078\u306eDLC(\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30e9\u30a4\u30af\u30ab\u30fc\u30dc\u30f3)\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u304c\u6319\u3052\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n
\u305d\u306e\u4ed6\u3001\u592a\u967d\u96fb\u6c60\u3001LED\u3001\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u306a\u3069\u306b\u3082\u5fdc\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
CVD\u6280\u8853\u306f\u3001\u9ad8\u6a5f\u80fd\u6750\u6599\u306e\u958b\u767a\u3084\u7701\u30a8\u30cd\u30eb\u30ae\u30fc\u5316\u3078\u306e\u8ca2\u732e\u304c\u671f\u5f85\u3055\u308c\u3066\u304a\u308a\u3001\u66f4\u306a\u308b\u767a\u5c55\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
\u7279\u306b\u3001\u4f4e\u6e29\u5316\u3001\u9ad8\u7cbe\u5ea6\u5316\u3001\u591a\u69d8\u306a\u6750\u6599\u3078\u306e\u5bfe\u5fdc\u3068\u3044\u3063\u305f\u8ab2\u984c\u3078\u306e\u89e3\u6c7a\u304c\u3001\u4eca\u5f8c\u306e\u7814\u7a76\u958b\u767a\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u30dd\u30a4\u30f3\u30c8\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
\u71b1CVD\u306f\u3001\u7089\u5185\u3092\u52a0\u71b1\u3057\u3001\u9ad8\u6e29\u74b0\u5883\u4e0b\u3067\u539f\u6599\u30ac\u30b9\u3092\u5206\u89e3\u30fb\u53cd\u5fdc\u3055\u305b\u308b\u3053\u3068\u3067\u8584\u819c\u3092\u5f62\u6210\u3057\u307e\u3059\u3002<\/p>\n\n\n\n
\u6bd4\u8f03\u7684\u5358\u7d14\u306a\u88c5\u7f6e\u69cb\u6210\u3067\u3001\u9ad8\u3044\u6210\u819c\u901f\u5ea6\u3092\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n
\u9069\u7528\u4e8b\u4f8b\u3068\u3057\u3066\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u3078\u306e\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u6210\u819c\u306a\u3069\u304c\u6319\u3052\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n
\u30d7\u30e9\u30ba\u30deCVD\u306f\u3001\u30d7\u30e9\u30ba\u30de\u3092\u767a\u751f\u3055\u305b\u308b\u3053\u3068\u3067\u539f\u6599\u30ac\u30b9\u3092\u6d3b\u6027\u5316\u3057\u3001\u4f4e\u6e29\u3067\u306e\u6210\u819c\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002<\/p>\n\n\n\n
\u57fa\u677f\u3078\u306e\u30c0\u30e1\u30fc\u30b8\u3092\u4f4e\u6e1b\u3067\u304d\u308b\u305f\u3081\u3001\u9ad8\u54c1\u8cea\u306a\u8584\u819c\u5f62\u6210\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
\u9069\u7528\u4e8b\u4f8b\u3068\u3057\u3066\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u7d76\u7e01\u819c\u5f62\u6210\u3001DLC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u304c\u6319\u3052\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n
\u5149CVD\u306f\u3001\u7d2b\u5916\u7dda\u3084\u30ec\u30fc\u30b6\u30fc\u5149\u3092\u7528\u3044\u3066\u539f\u6599\u30ac\u30b9\u3092\u52b1\u8d77\u3057\u3001\u8584\u819c\u3092\u5f62\u6210\u3057\u307e\u3059\u3002<\/p>\n\n\n\n
\u4f4e\u6e29\u30fb\u4f4e\u30c0\u30e1\u30fc\u30b8\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308a\u3001\u5149\u89e6\u5a92\u6750\u6599\u306e\u4f5c\u88fd\u306a\u3069\u306b\u3082\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
MOCVD\u306f\u3001\u6709\u6a5f\u91d1\u5c5e\u5316\u5408\u7269\u3092\u539f\u6599\u306b\u7528\u3044\u308b\u3053\u3068\u3067\u3001\u9ad8\u54c1\u8cea\u306a\u5316\u5408\u7269\u534a\u5c0e\u4f53\u8584\u819c\u306e\u5f62\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002<\/p>\n\n\n\n
\u7279\u306b\u3001\u7a92\u5316\u30ac\u30ea\u30a6\u30e0(GaN)\u7cfbLED\u3084\u9ad8\u96fb\u5b50\u79fb\u52d5\u5ea6\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf(HEMT)\u306a\u3069\u306e\u88fd\u9020\u306b\u5e83\u304f\u7528\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
CVD\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u306f\u3001\u819c\u8cea\u306e\u5747\u4e00\u6027\u3001\u819c\u539a\u5236\u5fa1\u3001\u6b8b\u7559\u5fdc\u529b\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f\u306a\u3069\u304c\u8ab2\u984c\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
\u3053\u308c\u3089\u306e\u8ab2\u984c\u3092\u89e3\u6c7a\u3059\u308b\u305f\u3081\u306b\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306e\u6700\u9069\u5316\u3001\u65b0\u3057\u3044\u539f\u6599\u30ac\u30b9\u306e\u958b\u767a\u3001\u88c5\u7f6e\u8a2d\u8a08\u306e\u6539\u826f\u306a\u3069\u304c\u884c\u308f\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n
\u672c\u8a18\u4e8b\u3067\u306f\u3001CVD(\u5316\u5b66\u6c17\u76f8\u6210\u9577)\u306b\u3064\u3044\u3066\u3001\u305d\u306e\u5b9a\u7fa9\u3001\u7a2e\u985e\u3001\u7279\u5fb4\u3001\u5fdc\u7528\u5206\u91ce\u306a\u3069\u3092\u89e3\u8aac\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n
\u71b1CVD\u3001\u30d7\u30e9\u30ba\u30deCVD\u3001\u5149CVD\u3001MOCVD\u3068\u3044\u3063\u305f\u69d8\u3005\u306a\u7a2e\u985e\u304c\u3042\u308a\u3001\u305d\u308c\u305e\u308c\u306b\u30e1\u30ea\u30c3\u30c8\u30fb\u30c7\u30e1\u30ea\u30c3\u30c8\u304c\u5b58\u5728\u3057\u307e\u3059\u3002<\/p>\n\n\n\n
\u7528\u9014\u306b\u5fdc\u3058\u3066\u6700\u9069\u306aCVD\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u3067\u3001\u9ad8\u54c1\u8cea\u306a\u8584\u819c\u3092\u52b9\u7387\u7684\u306b\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n
CVD\u6280\u8853\u306f\u3001\u534a\u5c0e\u4f53\u3001\u5207\u524a\u5de5\u5177\u3001\u592a\u967d\u96fb\u6c60\u306a\u3069\u3001\u5e45\u5e83\u3044\u5206\u91ce\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u304a\u308a\u3001\u4eca\u5f8c\u3082\u66f4\u306a\u308b\u767a\u5c55\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n
\u672c\u8a18\u4e8b\u304c\u3001CVD\u6280\u8853\u306e\u7406\u89e3\u306e\u4e00\u52a9\u3068\u306a\u308c\u3070\u5e78\u3044\u3067\u3059\u3002<\/p>\n\n\n\n
\u5f53\u793e\u306e\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30bf\u30fc\u306f\u696d\u754c\u6700\u9ad8\u6c34\u6e96\u306e\u8d85\u4f4e\u901f\u4f7f\u7528(1\u30ca\u30cem\/sec)\u3092\u5b9f\u73fe\u3057\u3066\u304a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n
\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30bf\u30fc\u3092\u304a\u63a2\u3057\u306e\u65b9\u306f\u305c\u3072\u5f53\u793e\u307e\u3067\u3054\u76f8\u8ac7\u304f\u3060\u3055\u3044\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"
CVD(\u5316\u5b66\u6c17\u76f8\u6210\u9577)\u3068\u3044\u3046\u8a00…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_locale":"ja","_original_post":"http:\/\/www.sdicompany.com\/column\/?p=475","footnotes":""},"categories":[2],"tags":[],"class_list":["post-475","post","type-post","status-publish","format-standard","hentry","category-dip-coat","ja"],"_links":{"self":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts\/475"}],"collection":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/comments?post=475"}],"version-history":[{"count":1,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts\/475\/revisions"}],"predecessor-version":[{"id":476,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/posts\/475\/revisions\/476"}],"wp:attachment":[{"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/media?parent=475"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/categories?post=475"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sdicompany.com\/column\/wp-json\/wp\/v2\/tags?post=475"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}